Direct thermal mass flow-meter for gas
0.2 - 2 ln/min | IQ+FLOW® Bronkhorst

Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and controllers have needed a footprint of 1.5", as for instance specified in the NeSSITM system. Now, and in close co-operation with TNO-TPD (leading Dutch institute for applied physics) Bronkhorst High-Tech has developed the IQ+FLOW® mass flow sensor. Due to the use of micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75", thereby realizing the ultra compact flow and pressure controllers.
High intrinsic quality, featuring...

- Flow ranges from 20 mln/min up to 2 ln/min (Full Scale values)
- Very stable Zero, due to the thermally balanced chip-sensor
- Compact assembly ensures space efficiency
- Economical solution, low cost of ownership
- Fast response, down to 150 msec