Proven Performance in Mass Flow Measurement & Control
EL-FLOW® Select Series Mass Flow Meters/Controllers are thermal mass flow meters of modular construction with a ‘laboratory style’ pc-board housing. Control valves can either be integrally or separately mounted, to measure and control gas flows.
•Lowest range 0,014...0,7 mln/min
•Highest range 8...1670 ln/min
Features
•High accuracy (standard 0,5% Rd plus 0,1% FS)
•Rangeability in digital mode up to 1:187,5
•Fast response (down to 500 msec), excellent repeatability
•Optional Multi-Gas / Multi-Range functionality: freely programmable ranges and gas types
•Pressure ratings 64 up to 400 bar (Multi-Gas / Multi-Range functionality up to 10 bar)
•Analog I/O-signals, RS232-connection; optional on-board fieldbus interface
•Electro-chemical polishing of all surfaces
•Compact, modular construction
•Metal sealed and/or down-ported versions available
Applications
•Analytical/environmental equipment
•Gas flow monitoring in food, chemical and petrochemical industries
•Gas consumption measurement in gas distribution systems for internal accounting purposes
•Detection of gas leakage through objects
•Semiconductor manufacturing
•Surface treatment installations