Flow meter with mass flow controller IQ+FLOW® ULTRA COMPACT
thermal massfor gasin-line

flow meter with mass flow controller
flow meter with mass flow controller
flow meter with mass flow controller
flow meter with mass flow controller
flow meter with mass flow controller
flow meter with mass flow controller
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thermal mass
for gas
4-20 mA, analog output, RS485, Modbus, RS-232
Protection level
Other characteristics
digital, ultra-compact, economical, with mass flow controller
Process pressure

Max.: 10 bar (145.04 psi)

Min.: 0 bar (0 psi)

Process temperature

Max.: 50 °C (122 °F)

Min.: 5 °C (41 °F)

Volumetric flow rate

Max.: 5 l/min (1.3 us gal/min)

Min.: 0.2 l/min (0.1 us gal/min)


0.5 %, 1.5 %


0.5 %


World's Smallest Mass Flow Meter / Controller Equipment manufacturers are looking for compact solutions to monitor or control the gas flow or pressure in their system. Previously, conventional mass flow and pressure meters and controllers have needed a footprint of 1.5", as for instance specified in the NeSSI™ system. Now, and in close co-operation with TNO-TPD (leading Dutch institute for applied physics) Bronkhorst has developed the IQ+FLOW® mass flow sensor. Due to the use of micro solid state technology (MEMS), Bronkhorst has been able to halve the footprint dimension to 0.75", thereby realizing the ultra compact flow and pressure meters and controllers. •Lowest range 0,2...10 mln/min •Highest range 0,1...5 ln/min High intrinsic quality, featuring... •Compact assembly ensures space efficiency •Economical solution, low cost of ownership •Analog or digital communication •Top-mount modules; easily accessible •Pre-tested “Plug and Play” manifold assemblies, reducing custom testing requirements Applications Examples of analytical applications based on the ultra compact modules with a footprint of 0.75” are: •Flow – Pressure control at the injector side of a GC •Flow control at the detector side of a GC or HPLC •Flow control in an FID (Flame Ionisation Detector)


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