This is a compact and space saving valve of AMD, MMD 3-type, 4-type and
5-type which is popular as an air operated valve and manual valve for
chemicals used with high purity chemical liquid systems.
The performance and model variations are similar to the conventional
models. The diaphragm valve structure that eliminates the cause of
particle generation and the PFA forming body have been incorporated.
This product can be used widely for processes using chemicals and
pure water in IC manufacturing lines.