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thermal mass flow controller

Analog thermal mass flow controller


KOFLOC 3660, 3665
The KOFLOC Standard Mass Flow Controller MODEL 3660 SERIES is a low-cost, general-purpose gas mass flow controller. The differentiating factor of the MODEL 3660 SERIES is its numerous variants and options, a room for customization at affordable cost. It has gained wide acceptance and solid reputation for its flexibility. MODEL 3660 SERIES is now in use as a component for Sputter deposition, bond wiring, welding and washing equipment in semiconductor industry, as well as for scientific and analytic purposes such as in thermal analysis and vacuum equipment. The MODEL 3660 and its numerous variants are also capable of meeting many unique industrial needs as the mass flow controller in industrial applications, including gas mixing, air sampling, burn control and more.

FEATURES
- Rohs compliance - SUS316 stainless steel - Unidirectional normally closed valve
- Highly reliable solenoid actuator - Compact & Low-Cost - Free mounting position
- Quick response - Low pressure-differential variant model

APPLICATIONS
- Air sampling - Analyzer component - Bioreactor
- Biotechnological process - Burn control - CCFL manufacturing
- Chamber pressure control - Chemical process - Environment monitoring
- Electronic device manufacturing - Food production - Fuel cell testing
- Fermentation process - Gas applications - Industrial furnace
- Leak testing - Pharmaceutical process - Pollution monitoring
- Process flow control - R&D - Solar power element manufacturing
- Secondary calibration reference - Semiconductor process - Sputter deposition
- Surface treatment process - Thermal flame spray - Thin film manufacturing
- Vacuum apparatus - Vapor deposition

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