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Mass flow controller EX-550 series for gasdigitalhigh-precision
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Characteristics
- Technology
- mass
- Fluid
- for gas
- Other characteristics
- digital, high-precision
- Pressure
Max.: 3,000,000 Pa
(435 psi)Min.: 50,000 Pa
(7 psi)
Description
■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range：10SCCM～5SLM
■Accuracy：±1%S.P.(25～100%F.S.)
±0.25%F.S.(～25%F.S.)
Metal seals.
High accuracy(±1% S.P.),Fast response ≦1 sec in all range.
Change of gas type by rotary-switch.
RS485 communication.
0-5VDC or 4-20mA Input/output signal and +/-15VDC or 24VDC power supply.
CE
Catalogs
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.