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Diaphragm flow controller 3200 massfor gas
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Characteristics
- Technology
- mass, diaphragm
- Fluid
- for gas
- Pressure
Min.: 50,000 Pa
(7 psi)Max.: 300,000 Pa
(44 psi)
Description
■Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Flow range：1SCCM～20SLM
■Accuracy：±1%F.S.
Control of minute flows avaiable from F.S.1SCCM by N₂ conversion.
Reduced dead volume thanks to the diaphragm seat valve.
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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.