Miniature pneumatic pressure regulator
150 psig | 12 series TESCOM

TESCOM 12 Series is a miniature ultra high purity IGS/VCR pressure reducing regulator. The 12 Series offers 5 Ra or 10 Ra microinch finishes, tied diaphragm and internally springless and threadless design. It provides inlet pressures of 150 psig / 10.3 bar, outlet pressure from 28" Hg-15, 30, 60, 100 psig / 28" Hg-1.0, 2.1, 4.1, 6.9 bar with flow rates up to 120 SLPM.

Applications:
* OEM Tools
* Gas Boxes
* Low-Pressure Gas Cabinets

Features and Benefits:
* Product of choice for state-of-the-art OEM gas systems
* Ultra-sensitive pressure contol enhances MFC performance
* Superior performance in a wide range of applications
* Flows from 2 sccm to 120 SLPM
* Unsurpassed droop and repeatablity in a micro component
* Metal-to-metal diaphragm to body seal for high leak integrity
* 10 Ra or 5 Ra microinch internal surface finish
* Meets SEMI F19 and SEMI Modular Interface specifications