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Flow rate: 0 l/min - 2,500 l/min
Pressure: 310, 70, 103 bar
... get with the SLA5800 Series mass flow controllers and meters. The SLA5800 Series features the high accuracy, high zero stability and high repeatability you expect from the industry ...
Brooks Instrument
Flow rate: 0 l/min - 300 l/min
Pressure: 7 psi - 90 psi
... insensitivity reduces crosstalk sensitivity for consistent mass flow delivery Features • Long-term zero stability of <±0.15% full scale per year • Settling times: 300 ms - <1 second • ...
Brooks Instrument
Pressure: 0 psi - 150 psi
GP200 Series is the first fully pressure-insensitive pressure-based mass flow controller (P-MFC) designed specifically for advanced Etch and Deposition processes in semiconductor manufacturing. The ...
Brooks Instrument
Flow rate: 0 l/min - 100 l/min
Pressure: 0 psi - 145 psi
... the art performance in high temperature gas measurement and control, the 5850EMH Series high temperature metal sealed mass flow controller from Brooks Instrument combines the outstanding ...
Brooks Instrument
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