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... Parylene deposition technologies developed in partnership with Coat-X Low-temperature deposition system for coating electronic, medical and semiconductor devices: CX-30/300/600 Innovative Parylene– ALD ...
... depositing an Al2O3 thin film on the front surface of the wafer of a crystalline solar cell by the thermal Atomic Layer Deposition ( ALD) to form a passivation layer. Spec High Throughput: 12,800 wafers/hr (1,600 ...
... Ideal for laboratory tests and industrial production of small pieces Perfectly suited for 3D complex-shaped components ALD deposition of Al2O3 and TiO2 Remote plasma source Gas panel with 4 heated precursors line ...
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