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... clamping plates is made of either natural hardstone - granite or ceramic materials. Depending on it's application, the clamping plates are equipped with micro holes and/or micro-fine suction grooves. Partial faces can ...
... Traditional porous metal vacuum chucks present limitations in uniformity, cleanliness and long-term stability. The new-generation ceramic-metal composite microporous vacuum chuck ...
... systems for adaptive
vacuum management and process monitoring.
Categories of vacuum chucks:
- Thinning chucks
- Dicing suction chucks
- Cleaning
... Commodity: Porous
ceramic discs
Typical Applications
- Semiconductor vacuum chuck systems (wafer grinding, wafer dicing, printing chucks)
- Vacuum
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