Ceramic vacuum chuck

workpiecefor grindingfor metrology

Product overview
In semiconductor, optics and high-precision electronic manufacturing, stable workpiece clamping and damage-free transfer are critical. Traditional porous metal vacuum chucks present limitations in uniformity, cleanliness and long-term stability. The new-generation ceramic-metal composite microporous vacuum chuck combines a high-performance microporous ceramic adsorption layer with a metal flange base to optimize functional performance and structural strength.

01 The key role of the microporous ceramic adsorption surface
The adsorption surface uses high-purity alumina (Al2O3) or silicon carbide (SiC) microporous ceramic materials, precisely sintered to form a uniformly distributed microporous structure. This enables:

• Uniform vacuum pressure distribution to avoid localized stress concentration
• Stable, scratch-free support for wafers, glass and thin-film substrates
• High surface cleanliness to reduce particulate contamination risk

02 Structural reinforcement design of the metal flange base
The microporous ceramic layer is bonded to the metal flange via high-vacuum brazing sealing, forming an integrated vacuum adsorption unit. The metal flange provides:

• High mechanical strength and impact resistance
• Improved installation and interface compatibility
• Optimized sealing paths to reduce leakage risk

03 Comparative analysis of traditional metal porous chucks and ceramic-metal composite chucks

• Pore uniformity: Traditional metal porous chucks show large deviation and uneven distribution leading to local pressure differences; ceramic-matrix microporous surfaces deliver uniform micropore arrangement and consistent full-area negative pressure
• Surface cleanliness: Metal surfaces are prone to oxidation and particle shedding, risking contamination; ceramic surfaces are chemically inert without impurity precipitation, suited for high-cleanliness environments
• Wear resistance: Metals have lower surface hardness and can wear or deform over time blocking pores; ceramic surfaces are high-hardness, wear- and aging-resistant, extending service life
• Workpiece adaptability: Metal surfaces can scratch thin sheets and wafers causing warpage; smooth ceramic surfaces enable damage-free clamping compatible with precision thin workpieces
• Structural stability: Metal porous chucks may deform and leak under long-term high-frequency operation; integrated ceramic-metal composite structure offers strong impact resistance and airtightness
• Application scenarios: Metal porous chucks suit general processing and cost-sensitive mass production; ceramic-metal composites are designed for high-precision semiconductor, optics and high-end electronics processes

04 Application value in precision manufacturing
Ceramic-metal composite microporous vacuum chucks are used in:

• Semiconductor wafer handling and alignment
• Flat panel display (LCD/OLED) substrate processing
• Fixturing for optical lens grinding and polishing
• High-precision processing of ceramic and thin-film materials

Conclusion
As semiconductor and precision manufacturing advance, vacuum gripping technology evolves toward ceramic composite structures. Ceramic-metal composite microporous vacuum chucks combine material and structural design to deliver more stable, cleaner adsorption solutions for high-precision production processes.

Technical characteristics / specifications

• Adsorption material: high-purity alumina (Al2O3) or silicon carbide (SiC) microporous ceramic
• Manufacture: precise sintering to achieve uniform microporous structure
• Composite structure: ceramic functional surface bonded to metal flange via high-vacuum brazing sealing
• Key benefits: uniform vacuum distribution, high surface cleanliness, scratch-free support, high wear resistance
• Metal flange functions: mechanical reinforcement, impact resistance, installation/interface compatibility, optimized sealing paths
• Typical applications: semiconductor wafer handling, LCD/OLED substrate processing, optical lens fixturing, thin-film and ceramic processing