Circular vacuum chuck

ceramicfor machiningworkpiece

Product Description
Porous silicon carbide (SiC) ceramic discs engineered for precision vacuum adsorption and air‑floating (air bearing) applications in semiconductor and advanced manufacturing environments. SiC material provides high hardness, thermal conductivity and chemical resistance to maintain stable vacuum holding force and uniform airflow distribution for non‑contact handling of wafers, panels and thin substrates.

Product Specifications
Formula: SiC
Form: Disc
Material: Porous silicon carbide ceramic
CAS Number: 409-21-2
Commodity: Porous ceramic discs

Typical Applications

• Semiconductor vacuum chuck systems (wafer grinding, wafer dicing, printing chucks)
• Vacuum chuck cleaning
• Transfer and handling vacuum chucks
• Precision air bearings and air‑floating platforms
• LCD and OLED display panel manufacturing
• Semiconductor microelectronics processing
• Mobile phone glass and panel handling
• Thin‑film processing
• Laser processing platforms
• Printing and coating systems
• Photovoltaic and solar cell production

Key Features

• Uniform and stable porous structure for consistent performance
• Reliable vacuum adsorption suitable for wafer handling
• Even airflow distribution for air‑floating applications
• Enables non‑contact, low‑damage handling of delicate substrates
• High dimensional accuracy with tight tolerances
• Designed for cleanroom and high‑clean manufacturing environments

Specifications & Variants

• Standard example: D80×2 mm (other diameters and thicknesses available)
• Multiple pore structures (typical pore sizes: 15 µm; also available: 30 µm)
• Consistent pore distribution across variants

Specifications / Tolerances (Disc)
Thickness: 2 mm ±0.1 mm
Outer diameter: 80 mm ±0.1 mm

Physical Properties
Density (g/cm³): 2.0 - 2.2

Mechanical Properties
Hardness (HRA): ≥ 40.00

Technical Characteristics

• Available diameters and thicknesses on request (example shown: D80×2 mm)
• Typical packaging: 1 piece per unit (custom packaging available)
• Color: grey (shades may vary)