Ceramic disk

alumina

Short description This alumina (Al₂O₃) porous ceramic disc series is designed for precision vacuum adsorption and air floating applications in semiconductor and advanced manufacturing environments. Featuring a uniform porous structure, the ceramics enable stable vacuum holding force and evenly distributed airflow, ensuring non-contact, damage-free handling of wafers, panels, and thin substrates.

Typical Applications

• Semiconductor vacuum chuck systems (Wafer grinding vacuum chuck; Wafer dicing vacuum chuck; Printing vacuum chuck)
• Cleaning the vacuum chuck
• Transfer and handling vacuum chuck
• Precision air bearing and air floating platforms
• LCD and OLED display panel manufacturing
• Semiconductor microelectronics processing
• Mobile phone glass and panel handling
• Thin film processing
• Laser processing platforms
• Printing and coating systems
• Photovoltaic and solar cell industries

Key Features

• Uniform and stable porous structure
• Reliable vacuum adsorption performance
• Even airflow distribution for air floating applications
• Suitable for non-contact, low-damage handling
• High-dimensional accuracy and consistency
• Designed for highly clean manufacturing environments

Product specifications (general)

• Multiple sizes and thicknesses available
• Different pore structures to meet varying load and process requirements
• Consistent pore distribution across all specifications

Product identification / composition Formula: Al₂O₃
Forms: Discs
Materials: Alumina Porous Ceramic
CAS Number: 1344-28-1
Commodity: Porous Ceramic Discs

Specifications / Tolerances (Disc)
Thickness: 2.5mm ±0.1mm
Outer diameter: 151.6mm ±0.1mm

Physical Properties
Density (g/cm³): 2.3 - 2.5

Mechanical Properties
Hardness (HRA): ≥ 50.00

Technical characteristics / specifications

• Formula: Al₂O₃ (alumina porous ceramic)
• Typical disc dimension (example variant): D151.6 × 2.5 mm (diameter × thickness)
• Thickness tolerance: ±0.1 mm
• Outer diameter tolerance: ±0.1 mm
• Typical pore size (example variant): 30 μm
• Density: 2.3–2.5 g/cm³
• Hardness: HRA ≥ 50.00
• Color (example variant): Blue-Gray
• Package unit (example variant): 1 pcs per unit
• Typical applications: vacuum chucks, air-floating platforms, panel handling, thin-film and laser processing
• Designed for cleanroom / precision manufacturing environments
• Available in multiple sizes, thicknesses and pore-structure variants to suit load and process requirements
• SKU (example variant): 69298-00001-1168