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... near‑perpendicular deposition for high-uniformity patterned films.
Key benefits
- Optimal coating quality: high-precision coatings on structured wafers with minimized shadowing for advanced 3D patterns.
- Service
... required during
coating.
Product categories
- Magnetron sputtering coating system
- Laser coating equipment
- Evaporation coating equipment
- Electron
...
- The system consists of the evaporation vacuum chamber, E-shaped electron gun(s), heating evaporation electrode, substrate heat revolution plate, working gas circuit, pumping system, vacuum
... technical parameters
- Vacuum chamber: SUS304 stainless steel, size Φ500 mm × H600 mm, front door with observation window to view electron gun and workpiece.
- Electron
Rx production vacuum coating machineHCTE-VCM-005
... bandpass films, dielectric films, high-reflection films and other kinds of membrane systems, which can achieve the membrane coating of 0-200 layers of membrane systems. ...
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