Precision sealing ring

custom-madeFKM

Product Overview
FKM (fluoroelastomer) and FFKM (perfluoroelastomer) O-rings engineered for semiconductor processing, including plasma etch, CVD/ALD, wafer handling and vacuum systems. Designed for chemical resistance, elevated temperature performance and ultra-low outgassing to meet cleanroom and high-vacuum requirements.

FKM O-Rings (Fluoroelastomer):

• Temperature resistance: -20°C to +200°C (short-term up to 250°C)
• Chemical resistance: acids, solvents, oils, ozone
• Hardness (Shore A): 70–90
• Compression set resistance: excellent for static seals
• Outgassing: low
• Typical applications: wet etch, wafer handling, sub-fab seals

FFKM O-Rings (Perfluoroelastomer):

• Temperature resistance: -10°C to +300°C (select grades up to 327°C)
• Chemical compatibility: resistant to strong acids, amines, solvents and common plasma gases (CF4, NF3, Cl2, HF, O3)
• Hardness (Shore A): 70–90
• Outgassing: ultra-low, suitable for high vacuum
• Plasma resistance: exceptional
• Typical applications: plasma etch, CVD, ALD, ion implant, vacuum chambers

Manufacturing & Capacity

• Flashless and burr-free molding processes
• Manufactured in ISO-certified clean production environments
• Cleanroom-compatible packaging and handling
• Large-scale capacity for bulk orders and JIT supply
• Custom formulations and prototyping for tool-specific requirements

Applications in Semiconductor Manufacturing

• Plasma etch and ashing systems
• Chemical Vapor Deposition (CVD)
• Atomic Layer Deposition (ALD)
• Dry and wet etch tools
• Vacuum load locks and chambers
• Wafer transfer and handling hardware
• Sub-fab equipment and seals
• CMP and lithography equipment

Availability

• Standard sizes: AS568, JIS and metric O-rings available from stock
• Custom sizes: Manufactured on request with short lead times
• Bulk orders: Supported with scalable production and global shipping

Why Choose Us?

• Proven expertise in high-purity elastomer solutions for semiconductor tools
• Strict quality control with ISO-certified production
• Global logistics support for just-in-time delivery
• Engineering assistance for material selection and application design
• Competitive pricing and responsive technical service
• In-house tooling, moulding and design facilities

Technical specifications

• Materials: FKM (fluoroelastomer) and FFKM (perfluoroelastomer)
• Temperature ranges: FKM -20°C to +200°C (short-term to 250°C); FFKM -10°C to +300°C (up to 327°C in select grades)
• Chemical resistance: FKM — acids, solvents, oils, ozone; FFKM — strong acids, amines, solvents and common plasma gases (CF4, NF3, Cl2, HF, O3)
• Hardness (Shore A): typically 70–90
• Outgassing: FKM low; FFKM ultra-low, suitable for high vacuum
• Plasma resistance: FFKM exceptional
• Particle generation: low, compatible with ultra-clean semiconductor processes
• Manufacturing: flashless, burr-free molding in ISO-certified clean production environments
• Packaging: cleanroom-compatible
• Sizes: standard AS568, JIS, metric; custom sizes available; bulk orders supported