The PFLOW3000 series of mass flow sensors are made with the micromachined (MEMS) sensing elements that offer an innovative thermal sensing principle with excellent linearity and removal of gas sensitivity of some common gases.
Measuring range [SCCM]
0 to 2...50 SLPM
Output signal
Linear, 0.5...4.5 VDC, Rs485 Modbus, I2C
Accuracy [± % FS] max.
±(1.5+0.2FS)
Supply voltage [VDC]
8...24
Humidity range
0...100% RH, no condensation
Supplier
Angst+Pfister Sensors and Power