Pulsed magnetron

customlinear array

Angstrom Sciences’ linear magnetrons incorporate our fully encapsulated patented, profiled NdFeB rare earth magnets that spread the field across the entire target surface increasing target utilization and minimizing particulate contamination form the target surface. Turbulent water flow is also featured in all our magnetron sputtering cathodes to provide optimal thermal transfer and minimizing non-uniformity due to hot spots on the target surface. These along with features like integral process gas inlets, solid anode walls, and the use of cutting-edge materials ensures unparalleled performance and reliability for your sputtering process. As more industries discover the speed, controllability, and bottom-line benefits of magnetron sputtering, Angstrom Sciences is developing tools to maximize the output of these larger, faster manufacturing processes. Bigger Solutions For those who must coat extremely wide substrates or must achieve extremely high throughput, linear magnetrons offer the perfect in-line solution. Total Power Compatibility Low-impedance heads provide RF, DC, Mid-Frequency DC, Pulsed DC, HiPIMS and Microwave power compatibility. Standard Fittings We can use ISO NW standard fittings, Conflat® metal seal flanges or custom O-ring sealed flanges for mounting. All utilities are typically maintained at atmosphere and accessed through standard O-ring compression fittings for easy installation in any vacuum system. Proven Performance These magnetrons deliver the unparalleled performance that has made Angstrom Sciences the standard of the industry.