Tungsten sputtering target

Angstrom Sciences offers a full line of UHV magnetron designs including our “ONYX- UHV” which features all metal seals, ceramic insulators and demountable magnet arrays. The fully welded construction allows bake-out to 450ºC. The “ONYX- UHV” circular is available from 1″ (25mm) to 16″ (400mm) target diameters and is compatible with all the accessories, magnet sets, and features found in the standard ONYX high vacuum cathodes. ONYX-UHV linear cathodes are also available in custom target sizes to meet any application requirement. Also available are the “ONYX- HT” (a High Temperature variant of the standard ONYX cathode with all ceramic insulators for high temperature operation that offers “near”-UHV performance). These magnetrons are compatible with DC, RF, Pulsed DC, and HiPIMS power supplies. A full range of options are also offered including insertion lengths, shutters, gas inlets, and cross contamination shields.