Anti-reflective vacuum coating machine SYRUSpro series

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Overview
The SYRUSpro series precision optics vacuum coater from Bühler Leybold Optics is engineered for continuous 24/7 optical filter volume production across deep ultraviolet (DUV), visible (VIS) and infrared (IR) spectral ranges. It delivers configurable process solutions for demanding coating specifications and high throughput manufacturing.

Key benefits

• Designed for tough applications: Meets stringent specifications across IR, DUV and extreme wavelength regimes.
• Matched to your process: Wide selection of high-quality components enables configuration to precise process requirements.
• Maximum flexibility: Eight chamber size options to match loading capacity and substrate dimensions.

Highlight features

• Chamber options: Eight chamber sizes with inner diameters from 710 mm to 2800 mm to fit defined loading and substrate sizes.
• Coatings choice: Supports edge filters (short/long pass), UV/IR cut filters, notch and narrow bandpass filters, dichroic color filters, polarization beam splitters, AR and HR coatings for lasers, and other specialized optical coatings.
• Key component flexibility: Configurable with in-situ optical monitoring, plasma sources, a broad range of electron‑beam and thermal evaporators, quartz crystal measurement (QCM) and multiple substrate holder systems.

Other features

• Automation: Advanced process control combining high programming flexibility with elevated automation for efficient continuous production.
• DUV optimization: Options for specially treated chamber surfaces, selected materials and tailored component configurations for low-loss coatings at 193 nm photolithography.
• IR applications: Adaptations for large IR material throughput, ensuring excellent layer performance and uniformity on flat and highly curved substrates.
• Customizable: Bühler Leybold Optics works with customers to specify configurations for required quality, efficiency and reliability.

Downloads

• Brochure for Precision optics (PDF)
• Technical data: Syruspro series (PDF)

Technical specifications

• Series / model: SYRUSpro
• Application: 24/7 optical filter volume production
• Spectral ranges: DUV, VIS, IR (including extreme wavelength regimes)
• Chamber sizes: 8 options; inner diameters 710 mm to 2800 mm
• Supported coatings: edge filters, UV/IR cut, notch, narrow bandpass, dichroic color filters, polarization beam splitters, AR/HR for lasers, etc.
• Configurable components: in-situ optical monitoring, plasma sources, electron‑beam and thermal evaporators, QCM, substrate holder systems
• Automation: advanced process control with high programming flexibility for continuous production
• DUV optimization: special chamber surface treatments and selected materials for low-loss 193 nm coatings
• IR capability: configured for high material throughput and uniform coatings on flat and curved substrates