Anti-reflective vacuum coating machine DLC 600

Overview
The LEYBOLD OPTICS DLC 600 is a precision vacuum coater using plasma-enhanced chemical vapor deposition (PECVD) to deposit diamond-like carbon (DLC) films for optical and thermal imaging components. It is designed to produce hard, uniform and environmentally resistant DLC layers optimized for infrared (IR) anti-reflection and protective coatings on Ge and Si substrates.

Key benefits

• Wide substrate compatibility: Gravity-based holding enables processing of varied shapes and geometries up to 300 mm diameter and approximately 30–40 mm height.
• Targeted IR performance: Process parameters and materials are matched to Ge and Si substrates to improve IR transmittance and deliver consistent anti-reflection performance.
• Durable protective DLC layers: The system deposits extremely hard, uniform DLC films with high environmental resistance to protect exposed optical surfaces.

Highlight features
Processing chamber and gas distribution — benchmark uniformity: The DLC 600 gas shower design provides highly uniform process gas distribution across the chamber, ensuring consistent film growth and tight thickness control across the full coating area—critical for low-light and IR applications such as night-vision and distance sensors.

In‑situ optical monitoring — reproducible layer stacks: The integrated OMS 5100 optical monitoring system controls film growth in real time, ensuring specified thickness tolerances and high repeatability so that designed layer stacks match the finished product.

Technical specifications

• Coating technology: Plasma-enhanced chemical vapor deposition (PECVD) for DLC films.
• Coating type: Diamond-like carbon (DLC) — hard, uniform, environmentally resistant.
• Supported substrates: Germanium (Ge) and Silicon (Si), optimized for IR anti-reflection.
• Max substrate diameter: up to 300 mm.
• Typical substrate height: approx. 30–40 mm.
• Substrate handling: Gravity-based holding to accommodate varied geometries.
• Process control: OMS 5100 in-situ optical monitoring for thickness control and reproducibility.
• Gas distribution: Specialized gas shower for exceptional uniformity.
• Product code: CUBE-00010-019.

Typical applications

• IR anti-reflection coatings for precision optics.
• Protective DLC layers for night-vision devices and thermal imaging systems.
• Sensors and components operating at IR wavelengths requiring durable, repeatable coatings.