Gas filter Wafergard® II SF

particulatemembranehigh-efficiency

Wafergard® II SF Mini XL In-line Gas Filters Superior particulate filtration for ultrapure gas system filtration Patented stainless steel membrane provide high-efficiency filtration Ideal for high-temperature and dynamic-pressure applications Excellent compatibility with most ultrapure semiconductor process gases For use with inert and reactive gases Typical use up to 60 SLPM Materials: Filter element: Patented stainless steel membrane filter Housing: Electropolished 316L stainless steel Surface finish interior: <=5 μin Ra Helium leak rating: Qualified 2`10-10 atm-cc/sec. Tested 1`10-9 atm-cc/sec. Downstream cleanliness: Particles: Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm Volatiles : =0.003 μm Operating conditions: Maximum inlet pressure: 165 bar (2357 PSI) at 20°C Maximum forward/reverse differential pressure: 140 bar (2000 PSID) Maximum operating temperature: 460°C at 35 bar (500 PSI)