Wafergard® III NF Micro In-line Gas Filters
Superior particulate filtration for ultrapure gas system filtration
Cleanest, most efficient all-metal filters available
Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.)
Ideal for high-temperature and dynamic-pressure applications
Filter element: Patented, sintered nickel membrane filter.
Housing: Electropolished F20 stainless steel housing
Surface finish interior: <=5 μin Ra
Helium leak rating: Qualified 2`10-10 atm-cc/sec. Tested 1`10-9 atm-cc/sec.
Particles1: Less than 0.03 particles/liter (=0.003 μm
Greater than 99.9999999% (9 LRV) removal of all particles (referenced at the most penetrating particle size)
Maximum inlet pressure: 207 bar (3000 PSI) @100°C
Maximum forward/reverse differential pressure: 35 bar (500 PSID)
Maximum operating temperature: Inert gases 400°C at 35 bar (500 PSI) Corrosive and reactive gases 50°C at 70 bar (1000 PSI)