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Membrane filter Wafergard® III NF
in-linehigh-temperatureparticulate

membrane filter
membrane filter
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Characteristics

Filtration element
membrane
Other characteristics
in-line, high-temperature, particulate
Filtration size

0.03 µm

Operating pressure

Max.: 207 bar (3,002.281 psi)

Min.: 35 bar (507.632 psi)

Description

Wafergard® III NF Micro In-line Gas Filters Superior particulate filtration for ultrapure gas system filtration Cleanest, most efficient all-metal filters available Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.) Ideal for high-temperature and dynamic-pressure applications Materials: Filter element: Patented, sintered nickel membrane filter. Housing: Electropolished F20 stainless steel housing Surface finish interior: <=5 μin Ra Helium leak rating: Qualified 2`10-10 atm-cc/sec. Tested 1`10-9 atm-cc/sec. Downstream cleanliness: Particles1: Less than 0.03 particles/liter (=0.003 μm Particle retention: Greater than 99.9999999% (9 LRV) removal of all particles (referenced at the most penetrating particle size) Operating conditions: Maximum inlet pressure: 207 bar (3000 PSI) @100°C Maximum forward/reverse differential pressure: 35 bar (500 PSID) Maximum operating temperature: Inert gases 400°C at 35 bar (500 PSI) Corrosive and reactive gases 50°C at 70 bar (1000 PSI)

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