Gas filter Wafergard® III NF-30

particulatemembranein-line

Wafergard® III NF-30 In-line Gas Filters Superior particulate filtration for ultrapure gas system filtration Cleanest, most efficient all-metal filters available Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.) Ideal for high-temperature and dynamic-pressure applications Typically used for flows up to 30 SLPM Materials: Filter element: Patented, sintered nickel membrane filter. Housing: Electropolished F20 stainless steel housing Surface finish interior: <=5 μin Ra Helium leak rating: Qualified 2`10-10 atm-cc/sec. Tested 1`10-9 atm-cc/sec. Downstream cleanliness: Particles1: Less than 0.03 particles/Liter (=0.003 μm Operating conditions: Maximum inlet pressure: 70 bar (1000 PSI) at 100°C Maximum forward/reverse differential pressure: 10 bar (150 PSID) Maximum operating temperature: Inert gases 400°C at 35 bar (500 PSI); Corrosive and reactive gases: 50°C at 70 bar (1000 PSI)