Stacked architecture positioning system CHARON2

3-axis6-axissingle-axis

CHARON2 is our most popular motion system platform. Through its robust and reliable stacked architecture, designed with modularity and scalability in mind, it is recognised as a cost effective entry point for many turn-key motion solutions. The CHARON2 family comes in a multitude of different predefined configuration ranging from single X axis to complete 6 degree-of-freedom (DOF) motion system. The choice from our standard electronics makes the CHARON2 system scalable in performance to best meet the targeted specifications. With over 3000 stages operating in the field, CHARON2 is addressing all semiconductor applications and many use cases of other markets, such as medical, pharmaceutical, or material science. Its position accuracy of ±1 µm level paired with excellent bidirectional repeatability and high dynamics are reached in an optimized footprint thanks to proprietary IP for motors, electronics and controlling, demonstrating ETEL’s world-class innovation and expertise capabilities. Characteristics Standard strokes of 365 x 355 mm and 475 x 410 mm Compact footprint and design suitable for space-limited applications Up to 6 degrees of freedom Up to 30 kg payload Built-in vacuum supply and customer signal cables at chuck level Here are the key features: Nanometer position stability Ensures precise positioning accuracy over extended periods. ISO2 clean room compatibility Suitable for controlled environments with stringent cleanliness requirements. Tip-Tilt correction with the Z3TM+ combined module Enables precise adjustment for optimal positioning.