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Semiconductor resin KrF
high-resistancephotosensitivehigh thermal stability

Semiconductor resin - KrF - Fujifilm NDT Systems - high-resistance / photosensitive / high thermal stability
Semiconductor resin - KrF - Fujifilm NDT Systems - high-resistance / photosensitive / high thermal stability
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Characteristics

Applications
for semiconductors
Other characteristics
high-resistance, photosensitive, high thermal stability

Description

Positive tone KrF photoresists covering a broad range of applications GKR series offers a wide lineup of products from high-thickness films to high-resolution products to meet the various requirements of customers. GKR-46xx/32xx series (for implant) GKR-53xx series (for C/H) GKR-63xx series (for L/S)

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Photoresists

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