Positive and negative tone resist series for a wide array of e-beam imaging applications
• Superior resolution
• Wide process windows
Product Lineup
FEP series and XFP series
The FEP series and XFP series of products are suited to work with a wide array of applications requiring positive tone imaging with e-beam exposure.
FEN series and XFN series
The FEN series and XFN series of products are suited to work with a wide array of applications requiring negative tone imaging with e-beam exposure.