Photosensitive resin developer OPD series

Overview FUJIFILM Electronic Materials offers a comprehensive range of TMAH-based developers for positive and negative photoresist systems. Available as Ready-to-Use (RTU) and concentrated formulations, the product line supports immersion and in-line track development for semiconductor manufacturing.

Product Lineup

• Ready-to-Use (RTU) Developers
  • Developer without surfactant (TMAH 2.38 wt%)
  • Developer with surfactant (TMAH 2.38 wt%)
• Concentrated Products
  • TMAH 24.9% concentrate (requires customer dilution)
  • 10% TMAH with surfactant (preblended concentrate for dilution)
• Model Examples
  • OPD 262 — surfactant-free developer
  • OPD 4262 — developer with broad-compatibility surfactant
  • OPD 4280 — developer with broad-compatibility surfactant
  • WNRD — negative resist developer

Features & Benefits

• Multiple purity grades including ultra-high purity options for advanced semiconductor and EUV applications
• RTU and concentrate formats to support both standard and on-site dilution workflows
• Compatible with immersion and in-line track development systems
• Surfactant options available to match resist and process requirements
• Bulk and concentrate supply for high-volume manufacturing

Packaging & Delivery

• 1000 L totes (one-way or returnable)
• 200 L drums (one-way or returnable)
• Bulk delivery (location dependent)
• 4 x 4 L bottles

Technical Specifications

• Chemical base: TMAH (tetramethylammonium hydroxide)
• Product types: RTU (e.g., TMAH 2.38 wt%) and Concentrates (e.g., 24.9% TMAH; 10% TMAH with surfactant)
• Applications: positive and negative resist systems; immersion and in-line track development; EUV compatible
• Surfactant: available with or without surfactant
• Purity grades: standard to ultra-high purity
• Delivery options: concentrate, bulk, drums, totes, small bottles

Ordering & Support

• Custom packing and dilution support available for high-volume customers
• Contact FUJIFILM Electronic Materials for samples, technical data sheets and regulatory information