Overview Precision temperature control of precursor materials with front-loading access. The TC2000™ family maintains accurate precursor temperatures during processing to guarantee steady vapor pressure and repeatable results.
Product Lineup
TC2000™ - Temperature controller
Three temperature ranges
Cool/Heat 15°C-40°C
Heat 35°C-70°C
Ultra heat 55°C-90°C
Hardware Configurations
Stand alone
Remote electronics
Rack Mounted
Features & Benefits
Front loading for easy access and maintenance
Pre-equipped for automatic refilling
Compatible with most industry-standard ampoules
Supports 1.5 L quartz container sizes
Flexible designs to integrate with process lines
Technical specifications
Model family: TC2000™
Purpose: Precision precursor temperature control to maintain steady vapor pressure during processing
Temperature ranges: Cool/Heat 15°C-40°C; Heat 35°C-70°C; Ultra heat 55°C-90°C
Hardware configurations: Stand alone; Remote electronics; Rack Mounted
Loading: Front loading
Refilling: Pre-equipped for automatic refilling
Ampoule compatibility: Most industry-standard ampoules
*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.
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