Automatic coating machine T-AlOx (AlOx + SiNx)

automatic coating machine
automatic coating machine
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Characteristics

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automatic

Description

This machine is designed to apply AlOx and SiNx layer to the rear side of wafers, which will enhance the recombination rate to increase its cell efficiency by minimizing the back-transmitted light and maximizing the light reflection. Spec High Throughput: 5,485 wafers/hr (640 wafers/boat) Cycle Time: 42 min Uptime: 97%

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