Mass spectrometer HMT

quadrupolefor process monitoring

A dual mode RGA system for vacuum diagnostics and process monitoring The Hiden HMT quadrupole mass spectrometer is a unique dual mode RGA system capable of operating at pressures up to 5×10-3 mbar without the need for differential pumping. Operation at this pressure is achieved using a specially designed ion source/quadrupole filter combination and software which corrects for abundance non-linearity. The unique high pressure specification makes the HMT ideal for process monitoring applications. Residual gas analysis Vacuum processing Near atmospheric XPS, APXPS Thin film optical coating CVD / MOCVD / ALD The HMT is for vacuum process analysis and residual gas analysis, and is vital for process running condition checks, and in process analysis for detecting unexpected contaminants. The HMT system can also operate in RGA mode in the same way as a traditional quadrupole RGA. Dual Faraday / electron multiplier detectors provide partial pressure sensitivities in the 10-13 mbar range. Typical processes that can be monitored include CVD, etching, PECVD and PVD. A process RGA tool for troubleshooting and monitoring. HMT mode for high pressure operation to 5×10-3 mbar (min detectable partial pressure 5×10-8 mbar) RGA mode for high sensitivity operation at P < 10-4 mbar (min detectable partial pressure 2 x 10-11 mbar) 100 amu mass range, Remote (PC) Control interface via MASsoft Professional PC software 100 amu mass range, Remote (PC) Control interface via MASsoft Professional PC software Stability (less than ±1% height variation over 24 h) MASsoft software control via RS232, USB or multiple systems via Ethernet LAN