Mass spectrometer EQP series

quadrupolefor analysis

Systems for Plasma Research High performance combined mass and energy quadrupole mass spectrometers for the characterisation of plasmas. EQP-6 300 or 510 amu mass range with 6 mm triple filter quadrupole mass spectrometer for a wide range of plasma research applications. EQP-9 9 mm triple filter quadrupole-based systems, featuring the broadest range of mass options available. 50 to 5000 amu options for high stability measurements and ion cluster analysis. EQP-20 featuring Hiden’s 20 mm triple filter quadrupole with zone I/zone H switchable for 20 amu with 0.003 amu peak width, and 200 amu mass range with unit mass resolution for characterisation of hydrogen isotope plasmas. Analysis of ions and radicals Etching/deposition studies Ion implantation Laser ablation Residual gas analysis Leak detection Plasma electrode coupling CVD / MOCVD / ALD Hiden plasma probes measure some of the key plasma parameters and provide detailed information relating to plasma reaction chemistry. Detailed understanding of the reaction kinetics of plasma ions and neutral species plays a key role in the development of advanced surface engineering processes such as HIPIMS. The integral electron bombardment ion source provides for analysis of neutrals and, with the addition of the EAMS (electron attachment mass spectrometry) electron attachment mode, for separation and identification of electronegative radical species. A high transmission 45° sector field energy analyser for positive and negative ion energy analysis up to 1000 eV is included in all of the EQP series instruments.