Langmuir probe ESPion

plasma potentialfor spectrometersautomatic

An advanced Langmuir probe for plasma diagnostics Routine monitoring of the I-V plasma characteristic by the Hiden ESPion probe gives direct information relating to plasma stability and reproducibility. Automatic real-time extrapolation of plasma parameters gives detailed information on plasma properties for use in characterisation and uniformity monitoring. Plasma Characterisation Plasma Etching and ALE HiPIMS Diamond-Like Carbon (DLC) Coating Pulsed Laser Deposition (PLD) Coatings DC Magnetron Deposition of SiBCN Films The ESPion system employs Orbital Motion Limited (OML) and Allen Boyd Reynolds (ABR) as standard plasma analysis models. The Hiden automatic Z-drive provides for spatially resolved measurements across the plasma volume. The standard Z-drive translation options are: 300, 600 and 900 mm. 15 scans per sec acquisition rate with D-O-E interface for auto, semi or manual analyses Hiden pioneers in passive RF compensation ESPion has the highest blocking impedance of any commercially available unit 4.25MOhm at 13.56 MHz cf. 100kOhm Gas cooled multi-inductor chain for high temperature plasma operation Gas cooled multi-inductor chain is user replaceable for tuning to other frequencies Reference probe compensates for low frequency effects e.g. shift in the plasma potential (e.g. anodised chamber walls) or noise (e.g. power supply) ESPion the fastest pulsed plasma specifications of any commercial probe ESPionSoft contains all necessary gating circuitry as standard 300, 600 or 915mm auto linear drive options Interlocked isolation valve, 90° probes, combined linear – rotary drives options available Self-cleaning cycle to limit probe tip contamination