Expanding Compatibility with Chemicals and Contributing to a Higher Yield Rate in Semiconductor Manufacturing
HORIBA Advanced Techno, Co., Ltd. developed and began sales of the HD-960LR, a new dissolved oxygen monitor for semiconductor and semiconductor manufacturing equipment manufacturers, on July 1, 2021.
The recent miniaturization and enhanced performance of semiconductors is diversifying chemicals used in the semiconductor manufacturing process, each of which requires proper management. This new dissolved oxygen monitor continuously monitors the dissolved oxygen content of chemicals with great accuracy in the semiconductor manufacturing process. The addition of a new internal sensor mechanism can suppress electrolyte degradation and even expands compatibility to ammonia water and specific organic solvents. Moreover, the adoption of this new mechanism has realized the industry’s top-class sensor replacement cycle of roughly one-year. The HD-960LR extends the sensor life approximately 1.3 times for ultrapure water and 70 times for ammonia water compared to our conventional products. A longer interval between sensor replacements helps drive operational efficiency.
The HORIBA Group will continue to respond to broad customer needs to contribute to a higher yield rate in semiconductor manufacturing.
Even the nanometer level contaminant in the semiconductor manufacturing process has the potential to cause semiconductor malfunctions.