Low profile, short-stroke XY stages with linear motors and micron-grade linear encoders
Stroke (mm) 10x10
Repeatability (µm) 0.5
Resolution (µm) 0.5
Load capacity (kg) 2.5
Velocity (mm/sec) 500
Drive mechanism direct drive
Motor linear, core-less, servo
Size (mm) - 65x65
Height (mm) - 15