Translation stage NDS70

piezoelectricclosed-loopminiature

for closed-loop (up to 50 nm resolution) for NOVA system Miniature translation stages with piezo electric inertial drive for NOVA system. Standard edition Technical data Width - 70 mm Height - 20 mm Depth - 70 mm Momentum (Mx) - 5 Ncm Momentum (My) - 5 Ncm Momentum (Mz) - 5 Ncm Blocking force (Fx) - 9 N Bearing force (Fy, Fz) - 30 N Guidance accuracy Yaw angle - 20 arc sec Pitch angle - 60 arc sec Vertical deviation - 1 um Lateral deviation - 2 um Measurement Information Reference Mark - center Resolution - 1um to 50 nm Supply Voltage - 5 V Power Consumption - 150 mA