Linear stage DSP50

XYZpiezo3-axis

driving force up to 15 N ultra compact multiphase stage for NOVA controller system Our new DSP50 linear stage, for the new generation of NOVA-controller devices, can handle up to 16N blocking force over a travel range of 10mm. With its specialist multi-phase controller it has a speed of up to 1mm/s and an extremely uniform movement due to the use of multiple piezo inertia drives. The optical sensor allows movement detection with a precision of 1nm and high repeatability. The linear stage is available as uniaxial, biaxial or triaxial positioning system for standard and vacuum conditions. The very compact design, reproducibility and outstanding precision give you advantages for many fields of use (e.g. optical measurement and adjustment). Technical data Width - 50 mm Height - 16 mm Depth - 50 mm Max. load Momentum (Mx) - 6.5 Ncm Momentum (My) - 6.5 Ncm Momentum (Mz) - 6.5 Ncm Blocking force (Fx) - 16 N Bearing force (Fy, Fz) - 0 N Guidance accuracy Yaw angle - 20 arc sec Pitch angle - 60 arc sec Vertical deviation - 1 um Lateral deviation - 2 um Measurement Information Reference Mark - middle Resolution - 1um to 1 nm Supply Voltage - 5 V Power Consumption - 200 mA