Vertical positioning stage GTS series

linear motor-drivensingle-axiscrossed roller

GTS-V series stages achieve the longest travel range, highest speed and best accuracy and repeatability compared to other platform vertical stages. Its low profile and high-precision motion capabilities make this stage an excellent choice for applications such as semiconductor wafer inspection, nanotechnology, automated device alignment, metrology, and quality control processes. •30 or 70 mm of precision vertical travel in a compact unit •Unobstructed access to the payload from any direction •Ripple-free motion and outstanding trajectory accuracy with vertical anti-creep crossed roller bearings •High sensitivity, excellent repeatability and high accuracy motion from an integrated linear encode Direct Vertical Guiding High-precision vertical motion is achieved using a direct vertical guiding system composed of matched pairs of anti-creep crossed roller bearings for the GTS30V and recirculating ball bearings for GTS70V. These linear guides were chosen to provide the straightest trajectory, smooth and precise motion and robust, long term operation. Additionally, the crossed roller bearings in GTS30V have the added advantage of more quiet, ripple-free motion, which is important in metrology level applications. High efficiency drive train A folded DC motor with a precision ground, low-friction lead screw delivers ultra-smooth motion even at high loads. A reduction belt between the motor and the lead screw increases the available output torque and reduces servo sensitivity, ensuring 100 nm MIM.