The HPS® series is an isolation valve developed by MKS Instruments. It is built with stainless steel construction with precise vacuum isolation.
It is equipped with bellows and ball valves, manual, pneumatic and electro pneumatic actuated valves on warmed or unheated angle. This unit is also supplied with inline structures, safety shut off valves and soft start valves. In addition, the pressure control valve is available with pendulum, butterfly, vane and poppet throttle valves with control subsystems.