Critical dimension measuring system NEXIV VMZ-S

field of view (FOV)distancecoordinate

Product overview
Nikon's NEXIV VMZ-S series video measuring systems provide precise dimensional and height inspection for industrial micro‑measurement tasks. The series includes three measuring envelopes (VMZ-S3020, VMZ-S4540, VMZ-S6555) and a choice of six optical zoom/head types, with TTL (through‑the‑lens) scanning laser autofocus as standard.

Speed and accuracy

• TTL scanning laser autofocus supports high‑speed height scanning up to 1,000 points/sec for fast surface profiling.
• Minimum readout 0.01 µm and laser AF repeatability 2σ ≤ 0.5 µm ensure traceable dimensional measurements.
• Designed for continuous inspection workflows with automatic measurement tolerant of component positioning variations.

Product highlights

• Six optical zoom types (Type 1, 2, 3, 4, TZ, A) covering wide fields of view and high magnifications; Type 1–3 prioritize low distortion and high NA, Type 4 and TZ support high magnification.
• 8‑segment ring illuminator with up to three incident angles (white LED) for improved edge capture; Type‑specific illumination options include episcopic, diascopic and darkfield.
• Capability to detect thin transparent layers (~0.1 mm) using TTL laser AF (not available for Type A).
• Imaging probe and probing options with low probing errors for fine feature measurement (P_FV2D,MPE 0.3 µm; P_F2D,MPE 0.8 µm).

Core features

• High‑accuracy, high‑speed dimensional measurement across multiple magnifications with high‑NA optics.
• Flexible illumination strategies and special options to measure difficult edges and complex features reliably.
• Black & white or color 1/3" CMOS camera options and seamless optical zoom for observation and measurement workflows.
• Integration with Nikon measurement software and optional SDKs for automation and data handling.

Specifications (summary)
Model | VMZ-S3020 | VMZ-S4540 | VMZ-S6555
XYZ strokes | 300 × 200 × 200 mm (TZ low‑mag: 250 × 200 × 200 mm) | 450 × 400 × 200 mm (TZ low‑mag: 400 × 400 × 200 mm) | 650 × 550 × 200 mm (TZ low‑mag: 600 × 550 × 200 mm)
Minimum readout | 0.01 µm (all models)
Maximum sample weight | 20 kg (accuracy guaranteed: 5 kg) | 40 kg (accuracy guaranteed: 20 kg) | 50 kg (accuracy guaranteed: 30 kg)
Maximum permissible error (MPE) | EUX/EUY, MPE = 1.2 + 4L/1000 µm; EUXY, MPE = 2.0 + 4L/1000 µm; EUZ, MPE = 1.2 + 5L/1000 µm
Probing error | P_F2D,MPE = 0.8 µm; P_FV2D,MPE = 0.3 µm
Camera | Black & White / Color 1/3" CMOS
Working distance | Type 1–3: 50 mm; Type 4: 30 mm; Type TZ: (high‑mag) 11 mm / (low‑mag) 32 mm; Type A: 73.5 mm (63 mm with Laser AF)
Laser AF repeatability | 2σ ≤ 0.5 µm
Illumination | Episcopic, diascopic, 8‑segment ring with multiple incident angles (white LED); type‑dependent configurations including darkfield
Power / consumption | AC100–240 V, 50/60 Hz / 2–4 A
Dimensions & weight | See model entries above (main body and controller dimensions/weights).

Technical specifications

• Series: NEXIV VMZ‑S (VMZ‑S3020, VMZ‑S4540, VMZ‑S6555).
• Minimum readout resolution: 0.01 µm.
• TTL scanning laser autofocus: up to 1,000 points/sec height scanning; repeatability 2σ ≤ 0.5 µm.
• Probing accuracy: imaging probe P_FV2D,MPE 0.3 µm; probing P_F2D,MPE 0.8 µm.
• Illumination: episcopic, diascopic, segmented ring illuminator (multi‑angle), white LED; darkfield options for selected types.
• Camera: 1/3" CMOS (BW or color).
• Power: AC100–240 V, 50/60 Hz; nominal consumption 2–4 A depending on configuration.
• Physical footprints and mass vary by model; consult model‑specific dimensions for installation planning.