Diameter measuring system NEXIV VMZ-NWL200

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Overview
VMZ-NWL200 is an automatic wafer measuring system that integrates the NEXIV video measuring system with the NWL200 wafer loader. Using advanced image processing, it performs automatic high-speed, high-precision measurements of 6-inch and 8-inch wafers held in carriers, and provides measurement data suitable for semiconductor process control.

Reliability, efficiency and operability

• High reliability: Fully automatic, repeatable measurements reduce operator variation. Nikon optical technology produces clear images for accurate edge detection.
• High efficiency: Inspection can be started with one click. Measurement throughput is significantly higher than conventional measuring microscopes, reducing cost of ownership.
• High operability: GUI displays wafer graphics so operators can select chips by clicking; dedicated software simplifies process-control workflows and accelerates feedback to production lines.

Product highlights

• Integrated measuring cell combining NEXIV video measuring system and NWL200 automatic wafer loader.
• Automatic and safe inspection of 6-inch and 8-inch wafers loaded in carriers.
• High-speed, high-precision measurement designed for semiconductor process control and Quality 4.0 data requirements.

Core features

• Automatic wafer handling and measurement for 6" and 8" wafers in carriers, including transfer and positioning functions.
• Robust inspection programs with creation, execution and storage capabilities and full traceability.
• Supports yield improvement by delivering rapid, high-quality measurement data to production control systems.
• GUI-driven chip selection and measurement setup to simplify operator tasks.

Technical specifications

• Device: Video Measuring System – NEXIV (VMZ-S3020 Type2 / Type3 / TypeTZ); Loader – NWL200
• Wafer size: 6 inch, 8 inch (SEMI/JEIDA standard)
• Compatible carriers: 6" – PA182-60MB-06XX (Entegris); 8" – PA192-80M-06XX (Entegris)
• Throughput (transfer reference): 6 min 45 sec for 25 wafers (excluding measurement time)
• Minimum L/S: 500 line/mm
• Operating temperature: 19–26 °C
• Operating humidity: less than 70% RH
• Dimensions (W x D): 4125 x 3040 mm
• Power supply voltage: AC 100–120 V / 200–240 V
• Power frequency: 50 Hz / 60 Hz
• Current consumption: 7.5 A / 3.7 A
• Vacuum: -80 kPa

Notes

• *1 Wafer transfer evaluation required before sale.
• *2 Transfer time indicated is for 25 wafers and excludes measurement time.