Atomic force microscope NX-TSH
for flat panel display inspectionmeasuringmetrology

atomic force microscope
atomic force microscope
atomic force microscope
atomic force microscope
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Characteristics

Type
atomic force
Technical applications
for flat panel display inspection, measuring, metrology
Options and accessories
motorized
Other characteristics
automated, motorized
Resolution

0.02 nm, 0.15 nm

Weight

2,720 kg
(5,996.6 lb)

Length

1,450 mm
(57.1 in)

Width

2,334 mm
(91.9 in)

Description

Park NX-Tip Scan Head - Automated Atomic Force Microscopy (AFM) System for measuring Ultra Large and Heavy Flat Panel Displays at the Nanoscale To answer the increasing demand for AFM based metrology on larger flat panel displays, Park Systems has introduced the NX-Tip Scan Head, which overcomes nanometrology challenges for sample dimensions over 300mm and weights above 1kg. The Tip Scanning Head (TSH) is a moving tip head designed specifically for automated AFM measurements and analyses on large samples such as OLED and LCD screens. With the Park NX-TSH, reliable, high resolution AFM images can be obtained on OLEDs, LCDs, photomasks, and more, using a gantry style bridge system to improve productivity and quality.

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