Gas pressure regulator SMSQ2Micro series

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The SMSQ2Micro and SMSQ2Micro130E series are the most advanced miniature UHP pressure regulators on the market. The series provide extremely precise and reliable pressure control that enhances MFC (Mass Flow Controller) performance vital to semiconductor production repeatability and yield. The series also provides superior leak integrity and low particle generation, both essential to semiconductor applications. The regulators are suitable for use with both inert and corrosive gases, and provide extraordinary response to step-function flow demand changes. The series utilizes a unique self-centering tied-diaphragm design that provides reliable seat sealing and pressure regulation. Particle generation and entrapment is minimized by eliminating the poppet spring and seat retention threads which further improves process cleanliness and purging performance. The SMSQ2Micro Series wetted components are fabricated from specialty metals to provide exceptional corrosion resistance, leak integrity, and maximum cycle life at inlet pressure up to 250 psig. The body is internally electropolished and manufactured from Parker Veriflo’s proprietary Vericlean™ 316L stainless steel that exceeds Semi F20 material requirements, each diaphragm and poppet are manufactured from Hastelloy C-22®, and each seat is available in either PCTFE or Vespel®. Both the SMSQ2Micro and SMSQ2Micro130E feature a small footprint surface mount footprint per SEMI Modular Interface Specifications and is available in both c-seal and w-seal configurations.