Electron beam evaporator EFM 6
process

electron beam evaporator
electron beam evaporator
electron beam evaporator
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Characteristics

Type
electron beam
Laboratory/process
process

Description

Evaporation area > 50 mm Crucible capacitiy up to 10 cm3 Evaporation from wires, rods or crucibles Integrated cooled shutter Water cooling for minimum pressure rise A FOCUS product The EFM 6 evaporator extends the EFM product range onto a larger scale. With a NW 63 CF (4.5" OD) base flange and a crucible capacity of up to 10 cm3, the EFM 6 holds about ten times as much material as the EFM 3. Already at a short working distance the evaporation area is larger than 50 mm in diameter, which makes the EFM 6 ideally suited for substrates between 2" and 4". Featuring an integrated flux monitor and shutter, the EFM 6 is a unique tool in the medium-sized evaporator range, not only suitable for the growth of sub-monolayers but also for thick bond pads etc. For extended service cycles, the EFM 6 is equipped with a double filament. The required high power to heat the large crucibles is supplied by the EVC 1200.

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*Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.