Oxygen analyzer DF-560E NanoTrace ULTRA
for quality controltracebenchtop

oxygen analyzer
oxygen analyzer
oxygen analyzer
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Measured entity
Application domain
for quality control
Measured value
Other characteristics
digital, cost-effective


The DF-560E NanoTrace ULTRA delivers industry-leading ultra-trace oxygen detection Now the exceptional Lower Detection Limit (LDL) of 45 parts-per-trillion (ppt) of the DF-560E ULTRA is displayed on the front screen. Once the DF-560E ULTRA is measuring below 1 ppb the units automatically convert to ppt providing the semiconductor industry with industry-best oxygen (O2) measurements for quality control in ultra-high-purity (UHP) electronic grade gas. High stability coulometric trace and percent measurements A no-compromise solution Simple maintenance and reduced ongoing costs Designed to measure ultra-trace O2 to the very lowest levels, the DF-560E ULTRA delivers the semiconductor industry an industry-leading 45ppt LDL. Our new DF-560E ULTRA firmware will automatically change units as it monitors your sample gas down to the ppt levels. Flexible and adaptable, it is able to monitor O2 in multiple background gases while logging data in a variety of formats. The DF-560E ULTRA negates the effects of upset-prone applications, thanks to Servomex’s high-stability Coulometric sensing technology, which delivers a fast speed of response in the presence of sample and flow rate changes. Designed for ease of use Ideal for semiconductor fabs and analytical carts, the DF-560E ULTRA is optimized for ease of use and portability. Operation is made via the front panel or digital communications, while hand-carry options make it easy to transport. The DF-560E ULTRA also reduces operational costs through its non-depleting, factory-calibrated Coulometric technology, providing cost-effective setup and configuration.


Meet this supplier at the following exhibition(s):

SEMICON Taiwan 2024
SEMICON Taiwan 2024

4-06 Sep 2024 Taipei (Taiwan Region)

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    DECARBON 2025
    DECARBON 2025

    10-11 Feb 2025 Berlin (Germany)

  • More information
    *Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.