Oxygen analyzer NanoChrome
carbon dioxidecarbon monoxidemethane

oxygen analyzer
oxygen analyzer
oxygen analyzer
oxygen analyzer
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Measured entity
oxygen, carbon dioxide, carbon monoxide, methane, argon, helium, hydrogen
Application domain
Measured value
trace, thermal conductivity
for integration
flame ionization, gas chromatography based
Other characteristics
high-performance, NMHC


The NanoChrome delivers ultra-trace measurements of UHP gases Incorporating the latest advances in gas sensing and signal processing methodology, the NanoChrome revolutionizes ultra-trace purity measurements for the semiconductor industry. The definitive solution for UHP gas monitoring applications A no-compromise solution Simple maintenance and reduced ongoing costs A high-performance analyzer specifically designed for the semiconductor manufacturing industry, the NanoChrome offers the highest reliability monitoring of argon (Ar), methane (CH4), carbon monoxide (CO), carbon dioxide (CO2), hydrogen (H2), nitrogen (N2) and non-methane hydrocarbons (NMHC) in a wide range of common background gases including Ar, H2, helium (He), N2 and oxygen (O2). Updated with a larger display and the latest software, the NanoChrome uses an advanced Plasma Emission Detector (PED) sensor and sensitive ProPeak software, both specially developed by Servomex. The NanoChrome’s sensing technology provides considerable advantages over traditional Flame Ionization Detector (FID) and Reduction Gas Detection (RGD) sensing technologies in terms of performance, stability, safety and ability to reduce on-going costs. Servomex’s advanced signal recovery uses patented ProPeak filtering methods to deliver a highly sensitive and selective measurement you can rely on. With no need for a methanizer or requirement flammable fuel gas, the NanoChrome also delivers appreciable cost benefits.


Meet this supplier at the following exhibition(s):

SEMICON Taiwan 2024
SEMICON Taiwan 2024

4-06 Sep 2024 Taipei (Taiwan Region)

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    10-11 Feb 2025 Berlin (Germany)

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    *Prices are pre-tax. They exclude delivery charges and customs duties and do not include additional charges for installation or activation options. Prices are indicative only and may vary by country, with changes to the cost of raw materials and exchange rates.