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The NanoChrome delivers ultra-trace measurements of UHP gases
Incorporating the latest advances in gas sensing and signal processing methodology, the NanoChrome revolutionizes ultra-trace purity measurements for the semiconductor industry.
Reliable UHP monitoring
A high-performance analyzer specifically designed for the semiconductor manufacturing industry, the NanoChrome offers the highest reliability monitoring of argon (Ar), methane (CH4), carbon monoxide (CO), carbon dioxide (CO2), hydrogen (H2), nitrogen (N2) and non-methane hydrocarbons (NMHC) in a wide range of common background gases including Ar, H2, helium (He), N2 and oxygen (O2).
Updated with a larger display and the latest software, the NanoChrome uses an advanced Plasma Emission Detector (PED) sensor and sensitive ProPeak software, both specially developed by Servomex.
High-performance at a lower cost
The NanoChrome’s sensing technology provides considerable advantages over traditional Flame Ionization Detector (FID) and Reduction Gas Detection (RGD) sensing technologies in terms of performance, stability, safety and ability to reduce on-going costs.
Servomex’s advanced signal recovery uses patented ProPeak filtering methods to deliver a highly sensitive and selective measurement you can rely on. With no need for a methanizer or requirement flammable fuel gas, the NanoChrome also delivers appreciable cost benefits.
The definitive solution for UHP gas monitoring applications
When monitoring UHP gases used in semiconductor wafer manufacture, the highest sensitivity and performance is essential.