Mass flow sensor FS4001

gas

The sensors are designed for instrumentation such as GC and others. It can also be used for the general purpose flow measurement under 1000 seem. This serial of mass flow sensors are primarily designed for gas low mass flow measurement with the Company's proprietary MEMS sensing technology. The conditioned laminar flow and electronics ensure high accuracy and reliability. Features ®Designed for low mass gas flow metrology ®Fast response time, customizable to 1 msec ®Laminar flow in full dynamic range ®Both analog and digital interface ®Large turn-down ration over 100:1 ®Optional detached design Applications *Laboratory flow measurement *GC mass spectrometers *Leakage detection *Instrumentation *Process monitor with dry gases *Automation Flow range 0-30... 1000 seem Accuracy - ±(1.5+0.5FS) - % Turn-down ratio - > 100:1 - Power consumption - <50.0 - mW Response time - 65 (default, 4, 8, 16, 33, 131 selectable) - msec Maximum pressure rating - 0.5 - MPa Maximum pressure loss - 30 (typical) - Pa