Mass flow sensor FS8000 series

for process monitoringgasanalog output

The sensors provide the fastest response to 1 msec, and it is best for automation, robot control and or other instrumentation applications. This serial of mass flow sensors are designed with fast response time for gas mass flow measurement utilizing the Company's proprietary MEMS sensing and control electronic technology. Semiconductor equipment and automation are two targeted applications. ®Designed for control automation ®Fast response time to 1 msec ®Fast flow switch capable ®Both analog and digital interface ®Large turn-down ration over 100:1 ®Compact footprint Applications *Equipment automation *Robotic actions *Leakage detection *Instrumentation *Process monitor with dry gases *Flow switching Flow range - 0- 100... 500 0 - 2000... 6000 - seem Accuracy - ±(2.0+0.5FS) - % Turn-down ratio - > 100:1 Power consumption - £ 50.0 - mW Response time - 5 msec typical; up to 1 customizable - msec Maximum pressure rating - 0.5 - MPa Maximum pressure loss - 900 (typical) - Pa Temperature - -10-55 - °C Power supply - 8 - 24 - Vdc Null shift - ± 30.0 - mV Temperature coefficient ±0.12 %/°C Output - Linear, l2C; Analog 0.5 - 4.5 Vdc Mechanical connection - M5 / Rc 1/8 inlet & M5 outlet Weight - 12 / 21 g