MF6600 mass flow meters are designed to replace mechanical rotameters for process control and monitoring. The micro-electro-mechanical system (MEMS) and Industrial Internet of Things (IIoT) enabled MF6600 to offer unprecedented performance with a battery power option at a cost comparable to those of its mechanical counterparts. Process line leakage detections, gas temperature, and gas auto-detections are among the possibilities.
The meters are operated with Siargo’s proprietary MEMS Thermal-D mass flow sensing technology and smart control electronics. The sensor surface is passivated with silicon nitride ceramic materials and water/oilproof nano-coating for performance and reliability. The meter body is made of PC + ABS and is suitable for most gas applications.
Specifications:
Full-scale flow range: Air, N2, O2 and Ar: 1, 2, 5, 10, 20, 50 or 70, CO2: 1, 2, 5, 10, 20 or 40
SLPM
Accuracy: ±2.0 %FS
Repeatability: 0.5 %FS
Working temperature: -10 ~ +55 °C
Maximum pressure: 1.0 MPa
Humidity: <95, no condensation %RH
Power supply: 3.6 ~ 24 (50 mA) / lithium-ion battery ER14250 Vdc
Digital output: RS485 Modbus half-duplex
Electrical connector: USB Type-C
MENU access: 1 function key/digital
Display: Instant flow rate, accumulated or totalized flow rate
Control: Manual
Mechanical connection: BSPT 1/4-Female
Protection: IP40
Storage temperature: -20 ~ +65 °C
Reference conditions: 20°C, 101.325 kPa, air
Fluid compatibility: Non-corrosive
CE: EN61326-1; -2; -3