Proportional flow regulator MFC series

massfor gasmanifold

OverviewSiargo mass flow controllers are designed for general-purpose non-corrosive gas flow control across multiple series covering a wide range of full-scale mass flow rates and form factors. The family offers various communication interfaces and configurable mechanical/electrical options useful for industrial applications.

MFC2000The MFC2000 series handles non-corrosive gas flow from 50 mLn/min to 200 Ln/min. Both analog and RS485 Modbus interfaces are available; optional DeviceNet, ProfiNet, EtherNet, EtherCat and IO-Link can be provided. Interfaces can be customized.

MFC2100The MFC2100 series is intended for non-corrosive gas control with full-scale rates up to 50 mLn/min and provides enhanced ingress protection (IP65). Electronics match the MFC2000 series. Electrical and mechanical interfaces are customizable.

MFC2600The MFC2600 series supports full-scale rates up to 50 mLn/min and uses a standard manifold mechanical connection to simplify multi-controller installations. The electrical interface can be fully customized.

MFC4000The MFC4000 series covers full-scale rates from 50 mLn/min to 1000 mLn/min and is designed for instrumentation or portable devices with a very small form factor. Analog and RS485 Modbus interfaces are available; other communication options can be provided.

MFC5000The MFC5000 series is SEMI-compliant for relevant applications and supports multiple bus communications including DeviceNet, ProfiNet, EtherCat and IO-Link. It is designed for process control with a 100:1 dynamic range, pressure control around 0.1–1 MPa (15–150 PSI), compensated temperatures typically 0–50 °C, and can operate under vacuum conditions.

MFC5100MThe MFC5100M series supports full-scale rates up to 100 Ln/min, features a touchscreen for basic user functions and offers RS485 Modbus with additional communication options available.

MFC1600The MFC1600 series is a cost-effective solution covering 50 mL/min to 20 L/min, uses an aluminum alloy housing, operates typically at 0.1–0.8 MPa (15–120 PSI) with compensated temperatures of 0–50 °C. Typical applications include thin-film deposition and medical equipment.

MFC1700The MFC1700 is based on the MFC1600 platform for general non-corrosive gas control from 50 mLn/min to 20 Ln/min, adds rotary switches for offline address and communication parameter programming and includes a hard offset reset switch for simplified operation.

MFC1100The MFC1100 series targets high-volume gas flow applications with full-scale ranges of 20–50 Ln/min, supports analog control (0–5 Vdc or 4–20 mA) and RS485 Modbus for proportional valve control, provides a 100:1 dynamic range and operates typically at 0.1–0.8 MPa (15–117 PSI) with compensated temperatures of 0–55 °C. Typical uses include digital anesthesia delivery and welding gases.

Technical specifications

• Product family: MFC mass flow controllers covering MFC1100, MFC1600, MFC1700, MFC2000, MFC2100, MFC2600, MFC4000, MFC5000, MFC5100M.
• Full-scale mass flow ranges: from 50 mLn/min up to series-dependent maximums (examples: MFC2000: 50 mLn/min–200 Ln/min; MFC4000: 50 mLn/min–1000 mLn/min; MFC5100M up to 100 Ln/min; MFC1600: 50 mL/min–20 L/min; MFC1100: 20–50 L/min).
• Interfaces: Analog, RS485 Modbus; optional DeviceNet, ProfiNet, EtherNet, EtherCat, IO-Link. Interfaces customizable.
• Ingress protection: MFC2100 offers enhanced ingress protection (IP65).
• Form factors: compact/portable (MFC4000), manifold connection for multi-controller installation (MFC2600), cost-effective aluminum housing (MFC1600).
• User interface: touchscreen on MFC5100M for basic functions.
• Standards: MFC5000 compliant with SEMI standards where applicable.
• Dynamic range: up to 100:1 (MFC5000, MFC1100).
• Pressure ranges: examples include 0.1–0.8 MPa (15–120 PSI); MFC5000 controls ~0.1–1 MPa (15–150 PSI).
• Operating temperature: compensated ranges typically 0–50 °C or 0–55 °C depending on series.
• Vacuum operation: MFC5000 capable of operating under vacuum conditions.